SUBSTRATE TREATMENT APPARATUS
申请公布号:JP2011077064(A)
申请号:JP20090223665
申请日期:2009.09.29
申请公布日期:2011.04.14
发明人:YAMASHITA EIJI;JODAI KAZUO
分类号:H01L21/306
主分类号:H01L21/306
摘要:PROBLEM TO BE SOLVED: To reduce the frequency of exchange of an etching liquid in a substrate treatment apparatus for applying etching treatment to a substrate. SOLUTION: The substrate treatment apparatus 1 for applying etching treatment to a substrate 9 having a silver thin film formed on a glass substrate includes a treatment chamber 11 for reserving the etching liquid, a substrate supporting section 12 for supporting the substrate 9 arranged in parallel in the treatment chamber 11, and an absorbent cartridge 13 opposing a top surface 91 of the substrate 9 in the treatment chamber 11. The absorbent cartridge 13 has a sheet-like absorbent 131 and is immersed in the etching liquid together with the substrate 9 so that a silver ion generated by the etching treatment for the top surface 91 of the substrate 9 can be absorbed by the absorbent 131. Thus, an increase in density of metal ions in the etching liquid is suppressed, a metal ion in the etching liquid is prevented from being reduced and precipitated to the substrate 9, and a frequency of exchange of the relatively expensive etching liquid is reduced. COPYRIGHT: (C)2011,JPO&INPIT
RELLENO SABORIZADO CON ACTIVIDAD DE AGUA BAJA PARA PRODUCTOS HORNEADOS A BASE DE HARINA
FILTER ELEMENT AND METHOD FOR MANUFACTURING THE PLATES THEREOF
PROTEIN FRACTIONATION AND SINGLE P0LYMER MATRIX UNIT CHROMATOGRAPHY
USE OF PROTEASOME INHIBITORS TO TREAT DRY EYE DISORDERS
DRUG DELIVERY SYSTEM COMPRISING A TETRAHYDROXYLATED ESTROGEN FOR USE IN HORMONAL CONTRACEPTION
A FEED DEVICE IN A MACHINE FOR MACHINING ENDS OF PIECES
MOTOR DRIVEN RESISTANCE SPOT WELDING GUN
METHOD FOR THE MANUFACTURE OF CONCRETE WITH A HIGH EARLY STRENGTH
A METHOD OF PREPARING AN INKJET INK IMAGED LITHOGRAPHIC PRINTING PLATE
STERILE LAMINAR AIRFLOW DEVICE
METHOD FOR THE PRODUCTION OF NANODISPERSIONS
MULTI-FUNCTION TOOL WITH LEVER LATCH
ANTIVIRAL NUCLEOSIDE DERIVATIVES