SHEET-LIKE POLISHING MEMBER,申请号JP20090226507-传众专利搜索

SHEET-LIKE POLISHING MEMBER

申请公布号：JP2011073093(A)

申请号：JP20090226507

申请日期：2009.09.30

申请公布日期：2011.04.14

申请人：

FUJIBO HOLDINGS INC

发明人：TAKEDA HIDENORI;HYODO TAKAYOSHI

分类号：B24B37/20;B24B37/24;B24B37/30;H01L21/304

主分类号：B24B37/20

摘要：<P>PROBLEM TO BE SOLVED: To provide a sheet-like polishing member restrained from being separated from a polishing device in polishing processing. <P>SOLUTION: A polishing sheet 10 has a urethane sheet 2 made by a wet film forming method. The urethane sheet 2 is uniformized in a thickness by applying buff processing to the opposite surface side of a skin layer 4. A surface on the skin layer 4 side constitutes a polishing surface P, and a buff processing applied surface constitutes a buff processing surface R. A cell 3 is formed on the urethan sheet 2. In the polishing sheet 10, for sticking to the polishing device, a double-sided adhesive tape 7 is stuck to the buff processing surface R side of the urethane sheet 2. A pressure sensitive adhesive layer 7b on one surface side of the double-sided adhesive tape 7 and the urethane sheet 2 constitute the polishing member 6. When sticking the doubler-sided adhesive tape 7 to the urethane sheet 2, coating processing is applied to the buff processing surface R of the urethane sheet 2 by a resin agent. A recess-projection of the buff processing surface R is leveled. <P>COPYRIGHT: (C)2011,JPO&INPIT