TRANSPARENT CONDUCTIVE MEMBRANE, METHOD FOR MANUFACTURING TRANSPARENT CONDUCTIVE FILM AND TRANSPARENT CONDUCTIVE MEMBRANE, AND FLEXIBLE DISPLAY USING TRANSPARENT CONDUCTIVE MEMBRANE
申请公布号:JP2011003456(A)
申请号:JP20090146749
申请日期:2009.06.19
申请公布日期:2011.01.06
发明人:SAKURAI MAKOTO;ONO SHINGO;NISHII MASAYUKI
分类号:H01B5/14;B32B7/02;B32B9/00;C23C14/08;H01B13/00
主分类号:H01B5/14
摘要:PROBLEM TO BE SOLVED: To provide a transparent conductive membrane suitable for a flexible display having flexibility and chemical resistance.SOLUTION: The transparent conductive membrane 3 installed on a flexible substrate 2 is formed by comprising a first transparent conductive layer 3-1 of crystalline property provided on the substrate side and a second transparent conductive layer 3-2 of amorphous property provided on the first transparent conductive layer. It is preferable that the first transparent conductive layer is an ITO layer with an SnOcontent ratio of 1 mass% or more and less than 10 mass% and that the second transparent conductive membrane is an ITO layer (transparent membrane of indium tin oxide) or an IZO layer (transparent membrane of indium zinc oxide) with an SnOcontent ratio of 10 mass% or more.