SUBSTRATE-PROCESSING APPARATUS,申请号JP20090146173-传众专利搜索

SUBSTRATE-PROCESSING APPARATUS

申请公布号：JP2011003766(A)

申请号：JP20090146173

申请日期：2009.06.19

申请公布日期：2011.01.06

申请人：

DAINIPPON SCREEN MFG CO LTD

发明人：NAKANE SHINGO

分类号：H01L21/02;H01L21/027

主分类号：H01L21/02

摘要：PROBLEM TO BE SOLVED: To provide a substrate-processing apparatus for assuring space enough to perform the pulling-out operation of a processing chamber 21 in performing its maintenance, and at the same time disposing a scaffold for the maintenance, in the substrate-processing apparatus 1 equipped with the processing chamber 21 disposed to be stacked in a multi-stage structure.SOLUTION: The scaffold 31 for the operation extending in the pulling-out direction of the processing chamber 21 is disposed inside a frame 3 for the maintenance. Further, a region for the pulling-out operation is assured by disposing the staging point 31 for the operation in a vertically asymmetric manner.