ILLUMINATION OPTICAL SYSTEM,申请号JP20100101208-传众专利搜索

ILLUMINATION OPTICAL SYSTEM

申请公布号：JP2010199605(A)

申请号：JP20100101208

申请日期：2010.04.26

申请公布日期：2010.09.09

申请人：

ASML NETHERLANDS BV;ASML HOLDING NV

发明人：VISSER HUIBERT;KLINKHAMER JACOB FREDRIK FRISO;RYZHIKOV LEV;COSTON SCOTT;JOOBEUR ADEL;VINK HENRI JOHANNES P;SHMAREV YEVGENIY KONSTANTINOVICH

分类号：H01L21/027

主分类号：H01L21/027

摘要：<P>PROBLEM TO BE SOLVED: To homogenize intensity characteristics or the like even when beams of light are individually patterned and are projected on a substrate in using an illumination source for generating a plurality of beams of light. <P>SOLUTION: The optical apparatus includes a homogenizer 100 and a coherence remover 102 to substantially homogenize and remove at least some coherence from the beam of light. The homogenizer is structured to convert the beam of light into a plurality of beams of light. The coherence remover is so structured that respective beams of light pass through different channels of the coherence remover. In other embodiment, the coherence remover converts the beam of light into a plurality of beams of light and the plurality of beams of light are delivered to the homogenizer. <P>COPYRIGHT: (C)2010,JPO&INPIT