PROBE CARD

申请公布号：EP2216655(A1)

申请号：EP20080853954

申请日期：2008.11.05

申请公布日期：2010.08.11

申请人：

TOKYO ELECTRON LIMITED

发明人：YONEZAWA, TOSHIHIRO;TAKASE, SHINICHIRO

分类号：G01R1/073;G01R1/44

主分类号：G01R1/073

摘要：<p>A probe card according to the present invention includes a support plate for supporting probes that contact an object to be inspected, a circuit board, a holding member for holding a lower surface of an outer peripheral portion of the support plate, and an abutting member disposed between the lower surface of the outer peripheral portion of the support plate and the holding member and protruding upward to abut to the lower surface of the outer peripheral portion of the support plate. Accordingly, horizontal expansion of the support plate itself is allowed, and at the time of inspecting electrical characteristics of the object to be inspected, even though the temperature of the support plate Is Increased and the support plate expands, the support plate can expand in a horizontal direction, thereby suppressing vertical deformation of the support plate.</p>