MOBILE BODY SYSTEM, EXPOSURE APPARATUS, AND METHOD OF PRODUCING DEVICE

申请公布号：EP1840943(A4)

申请号：EP20050809699

申请日期：2005.11.24

申请公布日期：2010.04.21

申请人：

NIKON CORPORATION

发明人：YODA, YASUSHI;SHIBAZAKI, YUICHI;ARAI, DAI

分类号：H01L21/027;G03F7/20;G12B5/00;H01L21/68

主分类号：H01L21/027

摘要：Stopper mechanisms (48A, 48B) keep a wafer table (WTB) and a measurement table (MTB) from moving closer than a predetermined distance, and the blocking by the stopper mechanisms can also be released by a drive mechanism (34A). Therefore, for example, in the case X-axis stators (81, 80) are driven independently, even if at least one of the two tables go out of control, the stopper mechanisms can keep the tables from coming into contact with each other, and for example, in the case the tables are to be in a state closer than the predetermined distance, by a release mechanism that releases the blocking of the stopper mechanisms, the tables can approach each other without the stopper mechanisms interfering.

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