METHODS AND APPARATUS FOR EXTENDING THE REACH OF A DUAL SCARA ROBOT LINKAGE,申请号KR20097027537-传众专利搜索

METHODS AND APPARATUS FOR EXTENDING THE REACH OF A DUAL SCARA ROBOT LINKAGE

申请公布号：KR20100037061(A)

申请号：KR20097027537

申请日期：2008.05.29

申请公布日期：2010.04.08

申请人：

APPLIED MATERIALS, INC.

发明人：COX DAMON KEITH;FREEMAN MARVIN L.;SCHALLER JASON M.;HUDGENS JEFFREY C.;BRODINE JEFFREY A.

分类号：H01L21/677;B25J9/06;B65G49/07

主分类号：H01L21/677

摘要：<p>Methods and apparatus are provided for the use of a dual Selective Compliant Assembly Robot Arm (SCARA) robot. In some embodiments two SCARAs are provided, each including an elbow joint, wherein the two SCARAs are vertically stacked such that one SCARA is a first arm and the other SCARA is a second arm, and wherein the second arm is adapted to support a first substrate, and the first arm is adapted to extend to a full length when the second arm supports the first substrate, and wherein the first substrate supported by the second arm is coplanar with the elbow joint of the first arm, and the second arm is further adapted to move concurrently in parallel (and/or in a coordinated fashion) with the first arm a sufficient amount to avoid interference between the first substrate and the elbow joint of the first arm. Numerous other embodiments are provided.</p>