METHOD FOR DEPOSITING A MATERIAL,申请号WO2009EP60859-传众专利搜索

METHOD FOR DEPOSITING A MATERIAL

申请公布号：WO2010023174(A1)

申请号：WO2009EP60859

申请日期：2009.08.24

申请公布日期：2010.03.04

申请人：

SOLMATES B.V.;JANSSENS, JAN ARNOUD;VAN DE EIJKEL, GERARD;DEKKERS, JAN MATTHIJN;BROEKMAAT, JOSKA JOHANNES;TE RIELE, PAUL

发明人：JANSSENS, JAN ARNOUD;VAN DE EIJKEL, GERARD;DEKKERS, JAN MATTHIJN;BROEKMAAT, JOSKA JOHANNES;TE RIELE, PAUL

分类号：C23C14/28;C23C14/50

主分类号：C23C14/28

摘要：<p>The invention relates to a method for depositing a material of a target (3) onto a surface of a sample (2), which method comprises the steps of : - irradiating a surface of the target with a laser or electron beam (7) to generate a plume (9) of target material particles; - positioning the sample (2) near the plume, such that the target material particles are deposited onto the surface of the sample; - rotating the sample around a rotation axis (1) being perpendicular to the surface of the sample onto which the particles are deposited; - moving the laser beam along the surface of the target, such that the plume moves in a radial direction in relation to the rotation axis; - pulsing the laser beam at a variable frequency.</p>