Device and method for regenerating an electroless metal plating bath

申请公布号：US7662266(B2)

申请号：US20050524737

申请日期：2005.02.16

申请公布日期：2010.02.16

申请人：

ATOTECH DEUTSCHLAND GMBH

发明人：HEYDECKE JENS;MURANUSHI MASANORI

分类号：B01D61/44;C23C18/31;B01D61/52;C02F1/42;C02F1/469;C23C18/16

主分类号：B01D61/44

摘要：In regenerating an electroless metal plating bath by electrodialysis, it has been found that the metal of the metal plating bath deposits in the electrolysis arrangement. To overcome this problem, an improvement to prior art regenerating devices is suggested, said improvement consisting in providing main cation exchangers for removing ions of this metal from a concentrate fluid. The main cation exchangers are coupled to the concentrate compartments of the electrolysis arrangement in such a manner that the concentrate fluid flowing through the concentrate compartments is allowed to pass through the main cation exchangers and to be recirculated back into the concentrate compartments.

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