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LASER TYPE GAS ANALYZER AND CONCENTRATION MEASURING METHOD OF OXYGEN GAS

申请公布号:JP2010032422(A)

申请号:JP20080196472

申请日期:2008.07.30

申请公布日期:2010.02.12

申请人:
FUJI ELECTRIC SYSTEMS CO LTD

发明人:HIRAYAMA NORITOMO;KOMINE SHIGERU;KOIZUMI KAZUHIRO;NAKAMURA YUSUKE;KANAI HIDEO

分类号:G01N21/59

主分类号:G01N21/59

摘要:PROBLEM TO BE SOLVED: To accurately detect the concentration of gas without being affected by a change in temperature environment. SOLUTION: An adjusting oxygen gas is airtightly held in an emission part housing 17 by a collimating lens 12 and the adjusting oxygen gas is airtightly held in a light detecting part housing 27 by a condensing lens 21. The emission wavelength of a laser element 41 is modulated in frequency so as to scan the absorption wavelength of a measuring target oxygen gas and the transmitted light transmitted through the measuring target oxygen gas is detected by a light detecting part 22 through the condensing lens 21. A signal comprising the double-frequency component of a modulation signal of an emission wavelength is detected in the detection signal of the light detecting part 22 and a high- and low-side peak values are searched in the double-frequency component signal. The concentration of oxygen between the laser element 41 and the light detecting part 22 is operated on the basis of those peak values and the preliminarily detected concentration of the adjusting oxygen gas in the emission part housing 17 and the light detecting part housing 27 is subtracted from the operated concentration of oxygen to set the concentration of the measuring target gas. COPYRIGHT: (C)2010,JPO&INPIT

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