METHOD FOR MANUFACTURING METAL-BASED CERAMIC COMPOSITE TARGET CONTAINING NOBLE METAL
申请公布号:US2009317280(A1)
申请号:US20080238477
申请日期:2008.09.26
申请公布日期:2009.12.24
发明人:CHEN JUNG-CHIH;YUCHEN SHU-HUA;HONG IN-TING;CHEN FU-TZAO;LIU CHENG-TUNG
分类号:B22F1/00
主分类号:B22F1/00
摘要:A method for manufacturing a metal-based ceramic composite target containing noble metal is provided, which includes firstly applying a ceramic powder uniformly onto a surface of a magnetic metal powder by using a wet powder mixing process, and drying it to obtain a ceramic-metal composite powder, and then uniformly mixing a noble metal powder with the ceramic-metal powder by using a dry powder mixing process, and finally making the ceramic-metal composite powder into a compact target by using a molding and compacting process. The manufacturing method of the present invention can uniformly mix the powders of the magnetic metal, the ceramic, and the noble metal, and reduce the loss of the noble metal powder in the production process of the target, so as to improve the quality of the target and decrease the production cost thereof.
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