WAFER STORAGE CARRIER,申请号US20090478046-传众专利搜索

WAFER STORAGE CARRIER

申请公布号：US2009308784(A1)

申请号：US20090478046

申请日期：2009.06.04

申请公布日期：2009.12.17

申请人：

OKI SEMICONDUCTOR CO., LTD.

发明人：YOSHINO KATSUHIRO

分类号：B65D85/00

主分类号：B65D85/00

摘要：It is an object of the invention to provide a wafer storage carrier that makes it possible to prevent wafers from being damaged or broken, regardless of the state of wafer warpage. A top plate and two side wall plates secured to left and right edges of the top plate describe two rectangular open-ended sides. One of these rectangular open-ended sides is closed off by a rear wall plate. At least two support rods constituting a wafer support shelf are affixed to a central portion of the rear wall plate with respect to the transverse direction, extending toward the other rectangular open-ended side.