REDUCED PRESSURE HEAT TREATMENT APPARATUS,申请号JP20080091904-传众专利搜索

REDUCED PRESSURE HEAT TREATMENT APPARATUS

申请公布号：JP2009246182(A)

申请号：JP20080091904

申请日期：2008.03.31

申请公布日期：2009.10.22

申请人：

COVALENT MATERIALS CORP

发明人：MATSUO YAYOI

分类号：H01L21/324;H01L21/22;H01L21/31

主分类号：H01L21/324

摘要：PROBLEM TO BE SOLVED: To provide a reduced pressure heat treatment apparatus maintaining seal characteristics (hermeticity) and suppressing breakage of a lower end portion of a reaction tube. SOLUTION: The reduced pressure heat treatment apparatus, holding a member to be treated inside the reaction tube 21 to perform heat treatment under a reduced pressure, includes at least: a manifold 5 the reaction tube 21 mounted above, a ring-like intermediate member 22 which is mounted on a top surface of the manifold 5 with an O-ring 11 therebetween and includes flat upper and lower surfaces; and the reaction tube 21 which is mounted on the top surface of the intermediate member 22 with a ring-like packing 23 having flat upper and lower surfaces therebetween. The thickness of the lower end portion 21a of the reaction tube 21 is thicker than the thickness of the other portions of the reaction tube 21. COPYRIGHT: (C)2010,JPO&INPIT