METHOD OF MANUFACTURING ACTUATOR AND ACTUATOR, AND LIQUID INJECTION HEAD,申请号JP20080083071-传众专利搜索

METHOD OF MANUFACTURING ACTUATOR AND ACTUATOR, AND LIQUID INJECTION HEAD

申请公布号：JP2009239016(A)

申请号：JP20080083071

申请日期：2008.03.27

申请公布日期：2009.10.15

申请人：

SEIKO EPSON CORP

发明人：NAKAYAMA MASAO;OHASHI KOJI

分类号：H01L41/09;B41J2/045;B41J2/055;B41J2/135;B41J2/14;B41J2/16;H01L41/18;H01L41/22;H01L41/29;H01L41/39

主分类号：H01L41/09

摘要：<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing an actuator which has high reliability and superior displacement characteristics, and to provide the actuator. <P>SOLUTION: The method of manufacturing the actuator 100 includes processes of: forming a diaphragm 20 on a substrate 10; forming a buffer layer 30; forming a lower electrode layer 42; patterning the lower electrode 42; and forming a piezoelectric material layer 44 on the lower electrode layer 42, left by the patterning and on the buffer layer 30 exposed by the patterning so that the piezoelectric material layer 44 has a small and uniform grain size as a whole, so that the actuator 100 has the high reliability. Furthermore, the method includes a process of forming an upper electrode layer 46 and a process of patterning the piezoelectric material layer 44 and an upper electrode layer 46. The process of patterning the lower electrode layer 42 includes a process of etching the lower electrode layer 42 by using a mixed etching gas which contains a chlorine-based gas and an oxygen-based gas. <P>COPYRIGHT: (C)2010,JPO&INPIT