STAGE UNIT, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD,申请号KR20090030131-传众专利搜索

STAGE UNIT, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

申请公布号：KR20090107435(A)

申请号：KR20090030131

申请日期：2009.04.08

申请公布日期：2009.10.13

分类号：H02K41/02;G03F7/20;H01L21/027

主分类号：H02K41/02

摘要：<p>PURPOSE: A stage unit, an exposure apparatus and a method for manufacturing a device are provided to exchange a plurality of stages without increasing the number of current amplifiers. CONSTITUTION: A stage unit includes a stator, a movable element, a controller, and a switch. The stator includes a first coil row(1), a second coil row(2), and a third coil row(3). In the first coil row, a first coil extended to a first direction is arranged to a second direction at right angles to the first direction. In a second coil row, a second coil extended to the first direction is arranged to the second direction. The second coil row is positioned in the first direction following the first coil row. The third coil row is extended to the second direction. The third coil is arranged to the first direction and covers the first coil row and the second coil row. The movable element has a magnet on the stator and a stage attached with the magnet. The controller makes a current amplifier(16) supply the current to the coil extended to the first direction. The controller controls the movable element by making the other current amplifier supply the current to the coil extended to the second direction. The switch contacts the first coil and the second coil.</p>