Micromechanical Component and Method for its Production,申请号US20070227385-传众专利搜索

Micromechanical Component and Method for its Production

申请公布号：US2009232334(A1)

申请号：US20070227385

申请日期：2007.04.02

申请公布日期：2009.09.17

申请人：

ROBERT BOSCH GMBH

发明人：FEYH ANDO;LAMMER MARCO

分类号：H04R11/04;H04R31/00

主分类号：H04R11/04

摘要：A cost-effective technology for implementing a micromechanical component is provided, whose layer construction includes at least one diaphragm on the upper side and at least one counter-element, a hollow space being formed between the diaphragm and the counter-element, and the counter-element having at least one through hole to a back volume. This back volume is formed by a sealed additional hollow space underneath the counter-element and is connected to the upper-side of the layer construction by at least one pressure equalization opening. This component structure permits the integration of the micromechanical sensor functions and evaluation electronics on one chip and is additionally suitable for mass production.