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PIEZOELECTRIC MIRROR DEVICE, OPTICAL DEVICE USING THE PIEZOELECTRIC MIRROR DEVICE AND METHOD FOR MANUFACTURING PIEZOELECTRIC MIRROR DEVICE
申请公布号：KR20090085021(A)
申请号：KR20097002010
申请日期：2008.06.04
申请公布日期：2009.08.06
发明人：MAEKAWA SHINJI
分类号：G02B26/10;B81B3/00;B81C1/00;G02B26/08;G02B27/18;H04N1/113
主分类号：G02B26/10
摘要：A piezoelectric mirror device (11) is provided with a frame section (12) having an opening section (13) at the center; a mirror section (14) positioned at the opening section (13); a pair of mirror supporting sections (15) which turnably support the mirror section (14) to the frame section (12); and a pair of driving sections (16), each of which is a laminated body of a lower electrode (17), a piezoelectric element (18) and an upper electrode (19). The mirror supporting section (15) is composed of a material having a Young's modulus of 160GPa or less. The frame section (12) has a notched section (13a) at a part of an area where the drivingsection (16) is positioned, and the notched section (13a) is brought into contact with the opening section (13). ® KIPO & WIPO 2009
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