THIN-FILM FORMING METHOD

申请公布号：JP2009130288(A)

申请号：JP20070306405

申请日期：2007.11.27

申请公布日期：2009.06.11

申请人：

ULVAC JAPAN LTD

发明人：HARADA MASAMICHI;OGAWA YOHEI

分类号：H01L21/3205;C23C14/14;C23C14/34;C23C16/18;C23C16/34;H01L23/52

主分类号：H01L21/3205

摘要：PROBLEM TO BE SOLVED: To provide a thin-film forming method capable of forming a barrier metal film, which has excellent step coverage against holes or a trenches for interconnection, the holes or trenches tending toward finer geometry, while maintaining the barrier property inherently demanded to the barrier metal film, and which can forming a Cu film without generating voids on the barrier metal film surface and with high adhesion therebetween. SOLUTION: The barrier film is constructed by forming a TiN film with an ALD (Atomic Layer Deposition) method, and a film selected from those of Ti, Ru, and Co, or an alloy film including at least two out of those is stacked on the TiN film surface with a CVD method or a PVD method. COPYRIGHT: (C)2009,JPO&INPIT

NOUVEAU MEDICAMENT UTILE DANS LE TRAITEMENT DES AFFECTIONS BACTERIENNES

PROCEDIMENTO DI COMBUSTIONE E BRUCIATORE PER LA SUA REALIZZAZIONE

DISPOSITIVO DI LUBRIFICAZIONE DOSATA PER LE POMPE DI INIEZIONE DI MOTORI A COMBUSTIONE

COMPRESSORE-RIDUTTORE DI FRATTURE OSSEE.

COMPLESSO CIRCUITALE PER TELECAMERA, COMPRENDENTE UN CIRCUITO DI CORREZIONE DELL'APERTURA E DEL GAMMA.

PROCEDIMENTO PER LA PREPARAZIONE DELLA DIOSSIFENILISATINA DISOLFATO SODICO E PRODOTTO OTTENUTO.

PRE-DEPURATORE D'ARIA PER MOTORI ACOMBUSTIONE.

TRASFORMATORE PER ALTA TENSIONE.

INSTALLAZIONE PER LA PRESSIONE E LA DISTRIBUZIONE DI ARTICOLI.

DISPOSITIVO PER LA CONVERSIONE DIRETTA DI ENERGIA RADIANTE IN ENERGIA ELETTRICA, CON PARZIALE ACCUMULAZIONE DI ENERGIA.

ORGANO DI TAGLIO PER RASOIO ELETTRICO A SECCO.

METODO PER LA PREPARAZIONE DISOLFATO DI CALCIO FIBROSO DISPERDIBILE E PRODOTTO COSI'OTTENUTO.

Fibre reinforced thermoplastic tube - where reinforcement incorporates thermoplastic filaments and is wound on hot to fuse to tube

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