Agile beam steering mirror for active raster scan error correction,申请号US20070962589-传众专利搜索

Agile beam steering mirror for active raster scan error correction

申请公布号：US7542200(B1)

申请号：US20070962589

申请日期：2007.12.21

申请公布日期：2009.06.02

申请人：

PALO ALTO RESEARCH CENTER INCORPORATED

发明人：STOWE TIMOTHY D.

分类号：G02B26/00;G02F1/00

主分类号：G02B26/00

摘要：Scan line position error resulting in banding, bow, skew, etc. is corrected by way of an agile beam steering mirror assembly in a ROS printing system and the like. The agile beam steering mirror system comprises a piezoelectric bending actuator fixedly mounted to a substrate at a proximate end thereof. A mirror structure is mounted at a free distal end of the bending actuator. Voltage applied to the bending actuator causes rotation of the mirror to thereby correct for positional errors of the scan line. Correction waveforms may be stored in control memory associated with the agile beam steering mirror assembly. A capacitive sensing circuit using a sensing electrode located beneath the free end of the bending actuator may be used in a feedback arrangement to determine and control mirror position.