METHODS AND APPARATUS FOR PRESSURE COMPENSATION IN A MASS FLOW CONTROLLER

申请公布号：US2009078055(A1)

申请号：US20080233405

申请日期：2008.09.18

申请公布日期：2009.03.26

申请人：

CELERITY, INC.

发明人：LULL JOHN MICHAEL;WANG CHIUN;SAGGIO, JR. JOSEPH A.

分类号：G01F1/00;G05B13/04;G05D7/06

主分类号：G01F1/00

摘要：Performance of mass flow controller may be vulnerable to pressure transients in a flow path to which the controller is coupled for the purpose of controlling the fluid flow. A system and method are provided for reducing or eliminate performance degradations, instabilities, and/or inaccuracies of a mass flow controller caused by changes in the pressure environment. In particular, a method and system are provided for compensating for pressure transients in the pressure environment of a flow path and mass flow controller.

ANALYSIS SLIDE AND ANALYZER

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WEIGHING APPARATUS

METHOD OF FORMING A CLADDING UNIT FOR A BUILDING

METHOD OF RECORDING PRINTS OF PARTS OF THE BODY

A COUPLING DEVICE FOR AUTOMATICALLY CONNECTING AIR LINES OF RAIL VEHICLES

AUTOMATIC CALIBRATION ARRANGEMENT FOR A TAPE RECORDER

LOCK ARRANGEMENTS FOR WRAP-AROUND CARTONS

HAZARD INDICATOR FOR A VEHICLE

APPARATUS FOR OPENING AND CLOSING LIDS

TOOTHED BELT DRIVE

SPRAY APPARATUS AND METHOD OF SPRAYING ARTICLES AND AN ARTICLE MADE BY THE METHOD

BALING MACHINES

REGULATING LOAD CURRENT

CLEANING APPARATUS

ELECTRODEPOSITING CHROMIUM

A HYDRAULIC SYSTEM OF A FORK LIFT TRUCK

TUNNEL LINERS

FIBER OPTIC CONNECTOR

SIGNAL PROCESSING CIRCUIT