ATOMIC PROBE MICROSCOPE AND CANTILEVER UNIT FOR USE IN THE MICROSCOPE,申请号EP19910103102-传众专利搜索

ATOMIC PROBE MICROSCOPE AND CANTILEVER UNIT FOR USE IN THE MICROSCOPE

申请公布号：EP0444697(A3)

申请号：EP19910103102

申请日期：1991.03.01

申请公布日期：1992.02.26

申请人：

OLYMPUS OPTICAL CO., LTD.

发明人：TODA, AKITOSHI;MISHIMA, SHUZO

分类号：G01B11/30;G01B21/30;G01N27/00;G01Q60/38;G01Q70/02;H01J37/252;H01J37/26;(IPC1-7):H01J37/252

主分类号：G01B11/30

摘要：An atomic probe microscope comprises a cantilever (111) which includes a lever section (202) provided with a probe (214), a lever attaching section (215) for supporting the lever section (202), and a positioning striking section formed at the lever attaching section. A cantilever unit comprises a seat (109) for supporting the cantilever (111) and provided with a struck face (304) against which the positioning striking section is struck. The object of the present invention is to provide a cantilever unit capable of making easier the exchange of the micro-cantilever with a new one for the atomic force microscope and the like and accurately attaching the new micro-cantilever to its original position with a higher reproductiveness. <IMAGE> <IMAGE>