PIEZOELECTRIC VIBRATOR AND ITS MANUFACTURING METHOD, AND MEMS DEVICE AND ITS MANUFACTURING METHOD,申请号JP20060339867-传众专利搜索

PIEZOELECTRIC VIBRATOR AND ITS MANUFACTURING METHOD, AND MEMS DEVICE AND ITS MANUFACTURING METHOD

申请公布号：JP2008153944(A)

申请号：JP20060339867

申请日期：2006.12.18

申请公布日期：2008.07.03

申请人：

SEIKO EPSON CORP

发明人：MATSUMOTO AKITO;HIGUCHI AMAMITSU;KONISHI AKIO

分类号：H03H9/02;H03H3/02;H03H9/17

主分类号：H03H9/02

摘要：PROBLEM TO BE SOLVED: To provide a piezoelectric vibrator capable of outputting signals of various frequencies. SOLUTION: The piezoelectric vibrator 100 includes a base body, a frame support part 40 composed of a portion of the base body and a plurality of vibrator parts 200a, 200b and 200c, respective vibrator parts have vibration parts 10a, 10b and 10c composed of a portion of the base body, wherein one end is fixed to an inner side of the support part and the other side is free, and driving parts 20a, 20b and 20c for generating bending vibrations of the vibration parts, wherein the respective vibration parts have different lengths, and the respective driving parts have a first electrode formed at an upper part of the base body, a piezoelectric body layer formed at an upper part of the first electrode, and a second electrode formed at an upper part of the piezoelectric body layer. COPYRIGHT: (C)2008,JPO&INPIT