METHOD AND DEVICE FOR CLEANING WAFER, AND MAGNETIC RECORDING MEDIUM OBTAINED BY SAME METHOD

申请公布号：JP2007329412(A)

申请号：JP20060161326

申请日期：2006.06.09

申请公布日期：2007.12.20

申请人：

FUJI ELECTRIC DEVICE TECHNOLOGY CO LTD

发明人：FUKAZAWA NAOTO;SHIROMA TAKAHIRO;ISO AKIYOSHI

分类号：H01L21/304

主分类号：H01L21/304

摘要：PROBLEM TO BE SOLVED: To provide a cleaning a wafer method for by which both superior efficiency percentage and detergency can compatibly be obtained at high levels. SOLUTION: When a wafer is cleaned by using a plurality of roll sponges which are radially disposed, the roll sponges are rotated on their lengthwise axes and also rotated around a radial center axis. COPYRIGHT: (C)2008,JPO&INPIT

SILVER HALIDE PHOTOGRAPHIC SENSITIVE MATERIAL

SUPPORTING BODY FOR PHOTOGRAPHIC PRINTING PAPER

LIQUID CRYSTAL DISPLAY DEVICE

OXYGEN PERMEABLE HARD CONTACT LENS

LIGHT BEAM SCANNING DEVICE

ELECTROPHOTOGRAPHIC SYSTEM COLOR IMAGE RECORDER

PRODUCTION OF ELECTROPHOTOGRAPHIC SENSITIVE BODY

PROCESSING METHOD FOR SILVER HALIDE COLOR PHOTOGRAPHIC SENSITIVE MATERIAL

OPTICAL INFORMATION STORAGE DEVICE

HYDROUS CONTACT LENS

RESIDUAL BATTERY CAPACITY MONITOR

ELECTROMAGENTIC FIELD ANALYZING METHOD

MEASURING APPARATUS OF BRAKING FORCE

CLINICAL THERMOMETER

RECTILINEAR DISTANCE MEASURING DEVICE

LARGE SCALE INTEGRATED CIRCUIT

DEVICE FOR TAKING TWO-DIMENSIONAL IMAGE OF FILM-FORM OBJECT

MEASURING METHOD OF CONNECTION LOSS OF OPTICAL CONNECTER

HEAT EXCHANGER WITH FIN AND MANUFACTURE THEREOF

UNDERFLOOR AIR INTRODUCER