METHOD FOR DECREASING CHEMICAL DIFFUSION IN PARYLENE AND TRAPPING AT PARYLENE-TO-PARYLENE INTERFACES,申请号WO2006US15500-传众专利搜索

METHOD FOR DECREASING CHEMICAL DIFFUSION IN PARYLENE AND TRAPPING AT PARYLENE-TO-PARYLENE INTERFACES

申请公布号：WO2006116326(A3)

申请号：WO2006US15500

申请日期：2006.04.21

申请公布日期：2007.11.01

申请人：

CALIFORNIA INSTITUTE OF TECHNOLOGY;TAI, YU-CHONG;RODGER, DAMIEN C.;LI, WEN;TOOKER, ANGELA

发明人：TAI, YU-CHONG;RODGER, DAMIEN C.;LI, WEN;TOOKER, ANGELA

分类号：C23C16/00

主分类号：C23C16/00

摘要：Systems and methods for improving the adherence of poorly-adherent parylene-to-parylene films or layers and/or altering the water and chemical permeability of the parylene layers. A device having two or more parylene layers is heated in a reduced pressure treatment chamber at a temperature above the deposition temperature of the parylene (e.g., from about room temperature to several hundreds of degrees Celsius) for an extended period of time (e.g., a few hours up to several days). The methods of the present invention have been shown to convert poorly-adherent and/or water-permeable films to optimally-adherent and/or relatively water-impermeable films.