CLEANING SYSTEM,申请号JP20060092114-传众专利搜索

CLEANING SYSTEM

申请公布号：JP2007266495(A)

申请号：JP20060092114

申请日期：2006.03.29

申请公布日期：2007.10.11

申请人：

KURITA WATER IND LTD

发明人：MORITA HIROSHI;NAGAI TATSUO;IKEMIYA NORITO;YAMAKAWA HARUYOSHI

分类号：H01L21/304;C25B1/28

主分类号：H01L21/304

摘要：PROBLEM TO BE SOLVED: To provide a cleaning system which repeats electrolyzation and cleaning by circulating a cleaning liquid to cut down the running cost. SOLUTION: This cleaning system comprises cleaning liquid lines 1, 2 for circulating a heated cleaning liquid via a cleaner 10 for cleaning an object 100 to be cleaned and electrolytic solution lines 7, 7a, 7b, 1, 6 for circulating an electrolytic solution via an electrolytic reactor 30 for passing and electrolyzing the target liquid. The cleaning and electrolytic solution lines have a mixed common line 1 which involves a diffluence in a downstream of the cleaner and a confluence of the downstream of the electrolytic reactor for the electrolytic solution in the upstream or downstream of the cleaner and lies in the upstream of the diffluence. In this way, the amount of cleaning liquid to be heated and that to be electrolyzed are both decreased without negating cleaning effects, resulting in running cost reduction. COPYRIGHT: (C)2008,JPO&INPIT