APPARATUS FOR THE REMOVAL OF A METAL OXIDE FROM A SUBSTRATE AND METHODS THEREFOR,申请号WO2006US36959-传众专利搜索

APPARATUS FOR THE REMOVAL OF A METAL OXIDE FROM A SUBSTRATE AND METHODS THEREFOR

申请公布号：WO2007038256(A3)

申请号：WO2006US36959

申请日期：2006.09.22

申请公布日期：2007.06.21

申请人：

LAM RESEARCH CORPORATION;YOON, HYUNGSUK, ALEXANDER;THIE, WILLIAM;DORDI, YEZDI;BAILEY, ANDREW, D., III

发明人：YOON, HYUNGSUK, ALEXANDER;THIE, WILLIAM;DORDI, YEZDI;BAILEY, ANDREW, D., III

分类号：B23K10/00

主分类号：B23K10/00

摘要：<p>An apparatus generating a plasma for removing metal oxide from a substrate is disclosed. The embodiment includes a powered electrode assembly, including a powered electrode, a first dielectric layer, and a first wire mesh disposed between the powered electrode and the first dielectric layer. The embodiment also includes a grounded electrode assembly disposed opposite the powered electrode assembly so as to form a cavity wherein the plasma is generated, the first wire mesh being shielded from the plasma by the first dielectric layer when the plasma is present in the cavity, the cavity having an outlet at one end for providing the plasma to remove the metal oxide.</p>