SEMICONDUCTOR TESTING APPARATUS AND SEMICONDUCTOR TESTING METHOD,申请号JP20000357982-传众专利搜索

SEMICONDUCTOR TESTING APPARATUS AND SEMICONDUCTOR TESTING METHOD

申请公布号：JP2002162445(A)

申请号：JP20000357982

申请日期：2000.11.24

申请公布日期：2002.06.07

申请人：

TOSHIBA MICROELECTRONICS CORP;TOSHIBA CORP

发明人：MATSUOKA AKIRA

分类号：G01R31/28;G01R31/3183;G06F11/22;H01L21/66

主分类号：G01R31/28

摘要：PROBLEM TO BE SOLVED: To reduce a pattern transfer time by minimizing the number of times of test pattern transfer from a buffer memory to a local memory, following a measurement sequence by a test program, and to thereby shorten the measuring time, in a function test of a semiconductor device. SOLUTION: In this semiconductor test device for executing the test by forwarding plural test patterns to a device to be measured via test pattern memories 702, 703, following the measurement sequence by the test program in order to execute the function test of the semiconductor device 704 which is measuring object, the measurement sequence is changed so that the number of times of test pattern transfer between pattern memories in the semiconductor test device becomes minimum.