CHEMICAL STORAGE DEVICE WITH INTEGRATED LOAD CELL

申请公布号：US2007062270(A1)

申请号：US20060458565

申请日期：2006.07.19

申请公布日期：2007.03.22

申请人：

MISRA ASHUTOSH;JURCIK BENJAMIN J JR;LAXMAN RAVI

发明人：MISRA ASHUTOSH;JURCIK BENJAMIN J.JR.;LAXMAN RAVI

分类号：G01F17/00

主分类号：G01F17/00

摘要：A chemical storage device and a method for monitoring chemical usage are described herein. The device and disclosed method utilize a chemical storage canister and a load cell integrated into one transportable unit. The load cell is capable of compensating for the added weight of attached dispensing devices used in the semiconductor industry. Additionally, the load cell continuously displays the weight of the chemicals as they are withdrawn from the chemical storage device. These functionalities are included in the control logic of the load cell which is incorporated into the load cell itself.

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