SYSTEM AND METHOD FOR ABSORBANCE MODULATION LITHOGRAPHY

申请公布号：WO2006088643(A3)

申请号：WO2006US03466

申请日期：2006.01.31

申请公布日期：2007.03.22

申请人：

MASSACHUSETTS INSTITUTE OF TECHNOLOGY;MENON, RAJESH;SMITH, HENRY, I.

发明人：MENON, RAJESH;SMITH, HENRY, I.

分类号：G03F7/09

主分类号：G03F7/09

摘要：A lithography system is disclosed that provides an array of areas of imaging electromagnetic energy that are directed toward a recording medium. The reversible contrast-enhancement material is disposed between the recording medium and the array of areas of imaging electromagnetic energy.

FREQUENCY DIVIDER BY THREE

ANALOGUE-DIGITAL CONVERTER

ANALOGUE-DIGITAL CONVERTER

SIGNAL CONVERTER

DEVICE FOR MANUFACTURING TUBULAR HEATER

TIMING DEVICE

PULSE SELECTOR BY DURATION

PULSE GENERATOR

METHOD AND DEVICE FOR CONTROL OF SERIES INVERTER

SYMISTOR CONTROL METHOD

DEVICE FOR CONTROL OF ELECTRIC DRIVE

DEVICE FOR REPRODUCING FROM MAGNETIC TAPE

EDUCATIONAL APPLIANCE ON MECHANICS

INFORMATION RETRIEVAL DEVICE

CODE-TO-SHAFT ANGULAR POSITION CONVERTER

METHOD OF CONTROL OF THREE-PHASE THYRISTORIZED REGULATOR OF ACTIVE SECTIONIZED LOAD

THREE-PHASE- M-PHASE DIRECT FREQUENCY CONVERTER

STATE SENSOR OF SEMICONDUCTOR RECTIFIER

CONVERTER OF BINARY CODE INTO BINARY-DECIMAL CODE OF DEGREES AND MINUTES

HAAR FUNCTION GENERATOR