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ADHESIVE CHUCK DEVICE
申请公布号：KR20060133942(A)
申请号：KR20067001279
申请日期：2006.01.19
申请公布日期：2006.12.27
发明人：OHTANI YOSHIKAZU;YOKOTA MICHIYA
分类号：G02F1/13;B65G49/06;G02F1/1333;H01J11/20;H01J11/44;H01L21/683
主分类号：G02F1/13
摘要：A board is surely mounted and removed by a simple structure. On a board side of a holding plate (1), an adhesive member (3) for adhering and holding a board (A) by facing a rear plane (A1) of the board, and a deforming film (4) which can deform by protruding and receding in a direction crossing a plane (1a) on the board side are provided. An adhesive surface (3a) of the adhesive member (3) and the board (A) are abutted and adhered by the protruding and receding deformation of the deforming film (4), and the board (A) is peeled from the adhesive surface (3a) of the adhesive member (3) without difficulty by forcibly separating the both.
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