EMERGENCY OFF UNIT OF SEMICONDUCTOR DEPOSITION EQUIPMENT,申请号KR20050031160-传众专利搜索

EMERGENCY OFF UNIT OF SEMICONDUCTOR DEPOSITION EQUIPMENT

申请公布号：KR20060108978(A)

申请号：KR20050031160

申请日期：2005.04.14

申请公布日期：2006.10.19

申请人：

SAMSUNG ELECTRONICS CO., LTD.

发明人：HAM, KYU HWAN

分类号：H01L21/205;H01L21/00

主分类号：H01L21/205

摘要：An emergency off unit of semiconductor deposition equipment is provided to prevent process accident in advance by employing a button cover for protecting a button of the emergency off unit. An emergency off switch(153) is electrically connected to a power supply unit of deposition equipment. An emergency off button(150) turns on/off the emergency off switch. A button cover(200) covers a predetermined section of the emergency off button and is provided with an opening(220) for exposing the emergency off button. A front section of the emergency off button is arranged in the opening. The front section of the emergency off button is positioned on the plane same with an outer cross-section of the button cover.