Quartz Tuning-Fork Resonators and Production Method,申请号US20050906767-传众专利搜索

Quartz Tuning-Fork Resonators and Production Method

申请公布号：US2006196845(A1)

申请号：US20050906767

申请日期：2005.03.04

申请公布日期：2006.09.07

申请人：

HONEYWELL INTERNATIONAL INC.

发明人：LAFOND PETER H.;KLEIN JOHATHAN L.

分类号：C23F1/00;C23C14/00;H01L21/306

主分类号：C23F1/00

摘要：Methods and apparatus for producing crystalline Quartz tuning-fork resonators using a deep reactive ion etching process. The resonators have an outline formed by a method including masking a substrate with a metal mask. The metal mask being resistant to reactive ion etching and conforming to the outline. The resulting plasma etched resonators are strong and have a high degree of symmetry, which substantially reduces common critical performance errors occurring in accelerometers, pressure sensors, tilt meters, scales, and rate gyroscopes.