Failure analyzing system and method for displaying the failure

申请公布号：US7071833(B2)

申请号：US20040869821

申请日期：2004.06.16

申请公布日期：2006.07.04

申请人：

ADVANTEST CORPORATION

发明人：NAGANO KATSUHITO;OGAWA SHUICHIRO

分类号：G01R31/28;G08B21/00;G05B23/02;H01L21/66

主分类号：G01R31/28

摘要：A failure analyzing system for displaying a position of a failure in a semiconductor device, includes: a circuit position memory for storing physical positions of respective circuits included in the semiconductor device; a defective information acquisition unit for acquiring information on a defective circuit included in the semiconductor device; and a display for displaying the defective circuit on a layout of the semiconductor device with a color that is different between the physical positions.

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