Waveguide for thermo optic device,申请号US20020233000-传众专利搜索

Waveguide for thermo optic device

申请公布号：US7006746(B2)

申请号：US20020233000

申请日期：2002.08.29

申请公布日期：2006.02.28

申请人：

MICRON TECHNOLOGY, INC.

发明人：BLALOCK GUY T.;RHODES HOWARD E.;AGARWAL VISHNU K.;SANDHU GURTEJ SINGH;FORESI JAMES S.;VIENS JEAN-FRANCOIS;FRIED DALE G.

分类号：G02B6/10;G02B6/12;G02B6/125;G02B6/136;G02F1/01;G02F1/025

主分类号：G02B6/10

摘要：A waveguide and resonator are formed on a lower cladding of a thermo optic device, each having a formation height that is substantially equal. Thereafter, the formation height of the waveguide is attenuated. In this manner, the aspect ratio as between the waveguide and resonator in an area where the waveguide and resonator front or face one another decreases (in comparison to the prior art) thereby restoring the synchronicity between the waveguide and the grating and allowing higher bandwidth configurations to be used. The waveguide attenuation is achieved by photomasking and etching the waveguide after the resonator and waveguide are formed. In one embodiment the photomasking and etching is performed after deposition of the upper cladding. In another, it is performed before the deposition. Thermo optic devices, thermo optic packages and fiber optic systems having these waveguides are also taught.