Method of fabricating multipole lens, multipole lens, and charged-particle beam instrument equipped therewith,申请号US20040811494-传众专利搜索

Method of fabricating multipole lens, multipole lens, and charged-particle beam instrument equipped therewith

申请公布号：US6946663(B2)

申请号：US20040811494

申请日期：2004.03.26

申请公布日期：2005.09.20

申请人：

JEOL LTD.

发明人：KAWAI EIJI

分类号：H01J3/22;H01J9/14;H01J9/236;H01J37/10;H01J37/141;(IPC1-7):H01J49/00;H01J3/14;G21K1/08

主分类号：H01J3/22

摘要：A method of efficiently fabricating a multipole lens. The multipole lens has plural polar elements and an annular holding member. Each polar element has a held portion. The annular holding member is provided with through-holes for holding the held portions of the polar elements. A resin is injected into the through-holes in the holding member via openings formed in the holding member, the openings being in communication with the through-holes. The injected resin is cured, thus holding the held portions of the polar elements to the holding member within the through-holes.