ALUMINUM CRAWL-UP PREVENTION MOLECULAR BEAM CELL,申请号JP20030408823-传众专利搜索

ALUMINUM CRAWL-UP PREVENTION MOLECULAR BEAM CELL

申请公布号：JP2005174987(A)

申请号：JP20030408823

申请日期：2003.12.08

申请公布日期：2005.06.30

申请人：

EPIQUEST:KK;KISHINO KATSUMI;KIKUCHI AKIHIKO

发明人：KISHINO KATSUMI;KIKUCHI AKIHIKO;YAMAMOTO TAKATOSHI

分类号：C23C14/24;H01L21/203;(IPC1-7):H01L21/203

主分类号：C23C14/24

摘要：PROBLEM TO BE SOLVED: To introduce a water-cooled pipe into molecular beam epitaxy equipment, to surround an upper edge of a crucible with it, to supply cooling water from outside and to cool the upper edge of the crucible. SOLUTION: In the crucible, a projection extended upward from a brim part is formed. An aluminum melting temperature is lowered, viscosity is raised, and crawl-up is stopped in the projection which is far from a heater and is in a low temperature. A nitrogen invasion prevention ring on a ring is disposed inside the crucible. Crawl-up of melt stops on a rear face of the ring. A ring opening part is narrow and prevents invasion of nitrogen radical. It effectively prevents crawl-up of aluminum. The projection and the nitrogen invasion prevention ring can be installed in an inner pot as double inside/outside crucible. COPYRIGHT: (C)2005,JPO&NCIPI