MACHINING METHOD AND MACHINING DEVICE,申请号JP20030345118-传众专利搜索

MACHINING METHOD AND MACHINING DEVICE

申请公布号：JP2005111571(A)

申请号：JP20030345118

申请日期：2003.10.03

申请公布日期：2005.04.28

申请人：

NIKON CORP

发明人：UCHISHIBA EISHIRO

分类号：B24B37/12;B24B53/017

主分类号：B24B37/12

摘要：<P>PROBLEM TO BE SOLVED: To provide a machining method and a machining device capable of reducing the deformation of a correction plate caused by its own weight while the correction plate with a small diameter is sufficient. <P>SOLUTION: When the surface of a workpiece 3 is convex, for instance, a tilt mechanism 5 is rotated slightly in a direction of an arrow mark D to incline the surface of a lapping surface table 1. The contact pressure distribution of the lapping surface table 1 and correction plate 2 thereby changes to be large at a part away from a rotating shaft of the lapping surface table 1, so that the surface shape of the lapping surface table 1 can be corrected into a convex surface. Conversely, when the surface of the workpiece 3 is concave, the surface of the lapping surface table 1 is inclined in an opposite direction to the arrow mark D. The contact pressure distribution of the lapping surface table 1 and correction plate 2 thereby changes to be large at a part close to the rotating shaft of the lapping surface table 1, so that the surface shape of the lapping surface table 1 can be corrected into a concave surface. Consequently, each of the convex and concave workpieces can be machined into a plane. <P>COPYRIGHT: (C)2005,JPO&NCIPI