MACHINABLE CERAMIC,申请号KR20040074574-传众专利搜索

MACHINABLE CERAMIC

申请公布号：KR20050030552(A)

申请号：KR20040074574

申请日期：2004.09.17

申请公布日期：2005.03.30

申请人：

SUMITOMO METAL INDUSTRIES, LTD.

发明人：ARAHORI, TADAHISA;ETOH, SHUNICHI;MORI, KAZUMASA

分类号：C04B35/48;C04B35/119;C04B35/488;C04B35/583;C04B35/5835;C04B35/593;C04B35/596;C04B35/645;(IPC1-7):C04B35/48

主分类号：C04B35/48

摘要：Provided is a high strength machinable ceramic with homogeneous blackish color for low reflectivity and thermal expansion coefficient close to that of silicon for high precision parts like probe guide. The blackish-colored machinable ceramic comprises 30-59.95wt.% of BN, 40-69.95wt.% of ZrO2, 0-20wt.% of Si3N4 and 0.05-2.5wt.% of colorant as main constituent, and 1-15wt.%(based on the main constituent) of sintering aid, wherein the colorant is at least one element selected from elements in the group IIIA -IVB in period 4, the group IVA -VB in period 5, the group IVA-VIB in period 6 on the periodic table, and preferably, Sc, Ti, V, Cr, Mn, Fe, Co, Ni, Cu, Zn, MO and W, and the sintering aid is at lest one compound selected from Al2O3, MgO, Y2O3, Lanthanoid metal oxide and composite oxide. The machinable ceramic is produced by mixing the above raw materials and sintering under high temperature(1400-1800deg.C) and high pressure(20-50MPa) such as hot press and hot isostatic processing(HIP). The resultant machinable ceramic, having 3-5x10^-6/deg.C of thermal expansion coefficient in a range of 25-600deg.C, and is applied to the production of a probe guide(3) used in detection of semiconductor parts, wherein the probe guide has several slits and/or pierced holes(12) which a probe(2) passes through.