Geometrical data measuring device for use in measuring the characteristics of surfaces, has receiving and processing units and modulation interferometer that are constructed such that probe units can operate with the same platform,申请号FR20040051852-传众专利搜索

Geometrical data measuring device for use in measuring the characteristics of surfaces, has receiving and processing units and modulation interferometer that are constructed such that probe units can operate with the same platform

申请公布号：FR2859016(A1)

申请号：FR20040051852

申请日期：2004.08.16

申请公布日期：2005.02.25

申请人：

ROBERT BOSCH GMBH

发明人：LINDNER MICHAEL;SCHMIDTKE BERND

分类号：G01B9/02;G01B11/24;G01B11/30;(IPC1-7):G01B11/30;G01J9/04

主分类号：G01B9/02

摘要：<p>Beam supply segment forms a single platform (PF) having a modulation interferometer (MI), processing unit (BA), receiving unit (R), and an interface (S). Different probe units (SE1, SE2) can be selectively connected to the interface (S). The modulation interferometer and the receiving and processing units are constructed such that the different probes can operate with the same platform and the interference beam can be processed. The probe units are connected to a measuring head (MK) of the platform.</p>