METHOD OF MANUFACTURING A SOLAR CELL,申请号WO2003JP11203-传众专利搜索

METHOD OF MANUFACTURING A SOLAR CELL

申请公布号：WO2004023567(A3)

申请号：WO2003JP11203

申请日期：2003.09.02

申请公布日期：2005.01.13

申请人：

EBARA CORPORATION;MISHIMA, TAKAHIRO;ISHIKAWA, NAOKI;EMOTO, MAKIKO

发明人：MISHIMA, TAKAHIRO;ISHIKAWA, NAOKI;EMOTO, MAKIKO

分类号：H01L31/04;H01L21/306;H01L31/0236;H01L31/18

主分类号：H01L31/04

摘要：A porous film having a resistance to etching is formed on a semiconductor substrate for a solar cell by using a paste. The semiconductor substrate having the porous film, which serves as a mask, is etched so as to form an antireflection structure having fine irregularities on the semiconductor substrate. The paste should preferably contain particles having an alkali resistance or an acid resistance.