Production controlling method,申请号US20020166689-传众专利搜索

Production controlling method

申请公布号：US6819975(B2)

申请号：US20020166689

申请日期：2002.06.12

申请公布日期：2004.11.16

申请人：

MITSUBISHI DENKI KABUSHIKI KAISHA

发明人：WATANABE SHINJI

分类号：G05B19/418;G06F7/00;G06Q50/00;G06Q50/04;H01L21/00;(IPC1-7):G06F7/00

主分类号：G05B19/418

摘要：Data on manufacturing processes in a semiconductor manufacturing apparatus mainly containing bar code data are input to a portable input unit in step S1. A main bar code label can be affixed to an extremely short bar-code-labeled component such as a reticle having only a very narrow bar-code to-be-labeled region, which enables data input by bar codes. The portable input unit is placed in a terminal in step S2, so that data input to the portable input unit are transferred to a production line terminal. The production line terminal performs a compiling process (production controlling process) in step S3 based on input data obtained from the portable input unit and master data obtained from a server. Consequently obtained are a production control system and a production controlling method capable of performing production control with high accuracy in which errors created by operators in data input are minimized.