Tunable gas distribution plate assembly,申请号US20030337483-传众专利搜索

Tunable gas distribution plate assembly

申请公布号：US2004129211(A1)

申请号：US20030337483

申请日期：2003.01.07

申请公布日期：2004.07.08

申请人：

APPLIED MATERIALS, INC.

发明人：BLONIGAN WENDELL T.;WHITE JOHN M.;BAGLEY WILLIAM A.

分类号：G02F1/13;C23C16/44;C23C16/455;C23C16/509;H01J37/32;(IPC1-7):C23C16/00

主分类号：G02F1/13

摘要：A gas distribution plate assembly and a method for distributing gas in a processing chamber are provided. In one embodiment, a gas distribution plate assembly includes a tuning plate coupled to a diffuser plate. The tuning plate has a plurality of orifice holes formed therethrough that align with a plurality of apertures formed through the diffuser plate, where the apertures each have a greater sectional area than the holes in the tuning plate. Each aperture is aligned with a respective hole to define gas passages through the gas distribution plate assembly. The tuning plate may be interchanged with a replacement tuning plate to change the gas flow characteristics through the gas distribution plate assembly.