SEMICONDUCTOR MANUFACTURING APPARATUS,申请号JP20020286090-传众专利搜索

SEMICONDUCTOR MANUFACTURING APPARATUS

申请公布号：JP2004127989(A)

申请号：JP20020286090

申请日期：2002.09.30

申请公布日期：2004.04.22

申请人：

HITACHI KOKUSAI ELECTRIC INC

发明人：SUGISHITA MASASHI;IWAKURA HIROYUKI;KOYAMA YOSHITAKA

分类号：H01L21/205;H01L21/02;(IPC1-7):H01L21/02

主分类号：H01L21/205

摘要：PROBLEM TO BE SOLVED: To grasp the true cause promptly when a plurality of alarms are generated mainly by the troubles. SOLUTION: A combination of a plurality of alarms to occur simultaneously or in a specified time period due to a trouble which is the principal cause of the alarms is in advance associated with the trouble, and then registered in a database 12 as a registered trouble occurrence pattern. Upon generation of a plurality of alarms due to a principal cause as a trouble taking place in an apparatus 1, data about the alarms are patterned by a pattern forming means 11 into a detected trouble occurrence pattern. The detected trouble occurrence pattern is compared in a comparing means 13 with registered trouble occurrence patterns from the database 12. In the presence of coincidence, a trouble is isolated in a concentration means 14 out of the registered trouble occurrence patterns as the principal cause of the alarms. Based on the result of concentration, alarms corresponding only to the principal cause are reported to a management controller 4. COPYRIGHT: (C)2004,JPO