微机电系统开关中之电极配置

申请公布号：TW200404734

申请号：TW092119929

申请日期：2003.07.22

申请公布日期：2004.04.01

申请人：

英特尔公司

发明人：马金

分类号：B81B7/02

主分类号：B81B7/02

代理人：林镒珠

地址：美国

摘要：本发明系揭示一种微机电系统(MEMS)开关，包括一讯号接点、一致动电极与一横梁，横梁系当一电压为施加至致动电极而接合讯号接点。讯号接点包括一第一部分与一第二部分。致动电极系定位于讯号接点的第一与第二部分之间。

SPEZIALSPULE FUER FLECHTMASCHINEN.

SCHRAUBENLOSE ANSCHLUSSKLEMME.

VORRICHTUNG ZUM ERZEUGEN VON LINIENMUSTERN.

Method of obtaining p-amino-n-2-diethyl aminoethyl chlorobenzamide and product obtained by this method

Pharmaceutical compositions

Improvements in and relating to anti-vibration mountings

Improvements in mouthpiece cigarettes and the manufacture thereof

Preparation of metal organo dithiophosphates

Fail-safe logic circuits having a combined and/not function

Improvements in fluid filters

Organosilicon compositions

Improvements in cellular structural material and method

Improvements in and relating to printing processes using magnetisable substances

Brake means for a conveyor

Improvements in or relating to tool holders

Speed detection

Sludge centrifuges

Weighing apparatus

Improvements in push/pull cables and armoured hoses

Electric lamp base and method of manufacture