METHOD OF MAKING A PRESSURE SENSOR WITH A RADIALLY TENSIONED METAL DIAPHRAGM,申请号CA20022724097-传众专利搜索

METHOD OF MAKING A PRESSURE SENSOR WITH A RADIALLY TENSIONED METAL DIAPHRAGM

申请公布号：CA2724097(A1)

申请号：CA20022724097

申请日期：2002.11.20

申请公布日期：2003.08.04

申请人：

DWYER INSTRUMENTS, INC.

发明人：TROYER, TERRENCE J.

分类号：G01L7/08;G01L9/12;G01L9/00;G01L9/04;G01L19/14

主分类号：G01L7/08

摘要：<p>A method of making a pressure sensor having a radially tensioned diaphragm for measuring fluid pressure. A first body member and a second body member are preheat-treated. A flexible diaphragm formed from an annealed precipitation hardening material is disposed between the first and second body members. The body members are attached to the diaphragm such that a first fluid chamber is formed between the first body member and the diaphragm and a second fluid chamber is formed between the second body member and the diaphragm. The first and second body members and the diaphragm are treated to tension the diaphragm. Also provided is a pressure sensor made by the method.</p>