Method and apparatus for evaluating electroluminescence properties of semiconductor materials and devices,申请号US20010683421-传众专利搜索

Method and apparatus for evaluating electroluminescence properties of semiconductor materials and devices

申请公布号：US2003122561(A1)

申请号：US20010683421

申请日期：2001.12.27

申请公布日期：2003.07.03

申请人：

STOKES EDWARD BRITTAIN;KARLICEK ROBERT F.

发明人：STOKES EDWARD BRITTAIN;KARLICEK ROBERT F.

分类号：G01R31/26;G01R31/311;(IPC1-7):G01R31/308

主分类号：G01R31/26

摘要：An apparatus for evaluating an associated semiconductor sample having two electrically distinct regions with a junction region disposed therebetween includes a laser for injecting carriers into a sample region, an electrical bias for impressing electrical fields on the sample, and a detector for detecting luminescence. A second laser is provided for injecting carriers into a second sample region opposite the first region. A method includes the steps of: optically generating carriers in a region, generating a drift field in the region that effectuates carrier drift toward the junction, and measuring the optical radiation generated by carrier recombination in the junction region. Preferably, the method also includes optically generating carriers in a second region and generating a drift field in the second region that effectuates carrier drift toward the junction. Typically, the two drift fields are generated together by applying voltage between the two regions.