THREE-DIMENSIONAL SHAPE MEASURING OPTICAL SYSTEM,申请号JP20010279475-传众专利搜索

THREE-DIMENSIONAL SHAPE MEASURING OPTICAL SYSTEM

申请公布号：JP2003083723(A)

申请号：JP20010279475

申请日期：2001.09.14

申请公布日期：2003.03.19

申请人：

MINOLTA CO LTD

发明人：ABE YOSHIHISA;EBIHARA AKIMITSU;KONO TOSHIO

分类号：G01B11/24;(IPC1-7):G01B11/24

主分类号：G01B11/24

摘要：PROBLEM TO BE SOLVED: To provide a three-dimensional shape measuring optical system capable of detecting the elevation position of a measuring object with high accuracy. SOLUTION: The three-dimensional shape measurement optical system uses a confocus detection method. An object optical system (12) focuses illumination light (L1) toward the measuring object (15) and focuses reflection light (L2) from the measuring object (15) toward a line sensor (14). A polarization beam splitter (11) splits the illumination light (L1) and the reflection light (L2) into paths, and a line sensor (14) detects the quantity of the reflection light (L2). The illumination light (L1) goes in the object optical system (12) with inclination so as to pass only one side region of an iris separated into two with the light axis center (AX2) of the object optical system (12) and the light among the reflection light (L2) having passes the one side region is shielded with a shield mask (16).