SEMICONDUCTOR DEVICE AND LIQUID CRYSTAL DISPLAY DEVICE
申请公布号:US2003034492(A1)
申请号:US20010730006
申请日期:2001.04.10
申请公布日期:2003.02.20
发明人:HAYASHI MASAMI;MURAI ICHIRO
分类号:H01L21/336;G02F1/136;G02F1/1362;H01L21/77;H01L21/84;H01L27/12;H01L29/786;(IPC1-7):H01L29/04;H01L31/036
主分类号:H01L21/336
摘要:A semiconductor device with a high reliability can be gained. The semiconductor device includes a substrate, a semiconductor layer, a gate insulating film and a gate electrode. The semiconductor layer is formed on the main surface of the substrate and includes source and drain regions adjoining each other via a channel region. The gate insulating film is formed on the channel region. The gate electrode is formed on the gate insulating film and has a sidewall. The gate insulating film includes an extended part which has sidewall positioned outside of the sidewall of the gate electrode. The source and the drain regions include high concentration impurity region which is formed in a region of the semiconductor layer apart from the sidewall of the extended part and low concentration impurity region, and which is formed in a region of the semiconductor layer positioned beneath the extended part.
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