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Verfahren zum Aufbringen einer Metallschicht

申请公布号:DE2151127(A1)

申请号:DE19712151127

申请日期:1971.10.14

申请公布日期:1972.07.13

申请人:
INTERNATIONAL BUSINESS MACHINES CORP.

发明人:JOHN COUMO,JEROME;ALLAN LAFF,ROBERT

分类号:C23C16/02;C23C16/04;H01L21/00;H01L49/02;H05K3/14

主分类号:C23C16/02

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